Arturo A Ayon
Arturo A Ayon
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Title
Cited by
Cited by
Year
Characterization of a time multiplexed inductively coupled plasma etcher
AA Ayón, R Braff, CC Lin, HH Sawin, MA Schmidt
Journal of the electrochemical Society 146 (1), 339, 1999
5491999
Molding of deep polydimethylsiloxane microstructures for microfluidics and biological applications
A Folch, A Ayon, O Hurtado, MA Schmidt, M Toner
3561999
A six-wafer combustion system for a silicon micro gas turbine engine
A Mehra, X Zhang, AA Ayon, IA Waitz, MA Schmidt, CM Spadaccini
Journal of Microelectromechanical systems 9 (4), 517-527, 2000
3502000
Power MEMS and microengines
AH Epstein, SD Senturia, G Anathasuresh, A Ayon, K Breuer, KS Chen, ...
Proceedings of International Solid State Sensors and Actuators Conference …, 1997
2991997
Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)
KS Chen, AA Ayón, X Zhang, SM Spearing
Journal of Microelectromechanical Systems 11 (3), 264-275, 2002
2782002
Micro-heat engines, gas turbines, and rocket engines-The MIT microengine project
A Epstein, S Senturia, O Al-Midani, G Anathasuresh, A Epstein, S Senturia, ...
28th Fluid dynamics conference, 1773, 1997
2471997
Microfabrication of a high pressure bipropellant rocket engine
AP London, AA Ayon, AH Epstein, SM Spearing, T Harrison, Y Peles, ...
Sensors and Actuators A: Physical 92 (1-3), 351-357, 2001
1892001
Stability of self-assembled monolayers on titanium and gold
G Mani, DM Johnson, D Marton, VL Dougherty, MD Feldman, D Patel, ...
Langmuir 24 (13), 6774-6784, 2008
1522008
Controlling and testing the fracture strength of silicon on the mesoscale
KS Chen, A Ayon, SM Spearing
Journal of the American Ceramic Society 83 (6), 1476-1484, 2000
1372000
Microfabrication of high-temperature silicon devices using wafer bonding and deep reactive ion etching
A Mehra, AA Ayón, IA Waitz, MA Schmidt
Journal of microelectromechanical systems 8 (2), 152-160, 1999
1201999
Drug delivery from gold and titanium surfaces using self-assembled monolayers
G Mani, DM Johnson, D Marton, MD Feldman, D Patel, AA Ayon, ...
Biomaterials 29 (34), 4561-4573, 2008
1102008
Deep reactive ion etching: a promising technology for micro-and nanosatellites
AA Ayon, RL Bayt, KS Breuer
Smart materials and structures 10 (6), 1135, 2001
1072001
Multi-stack silicon-direct wafer bonding for 3D MEMS manufacturing
N Miki, X Zhang, R Khanna, AA Ayón, D Ward, SM Spearing
Sensors and Actuators A: Physical 103 (1-2), 194-201, 2003
1062003
High efficiency hybrid silicon nanopillar–polymer solar cells
PR Pudasaini, F Ruiz-Zepeda, M Sharma, D Elam, A Ponce, AA Ayon
ACS applied materials & interfaces 5 (19), 9620-9627, 2013
1032013
Inertial sensor technology using DRIE and wafer bonding with connecting capability
K Ishihara, CF Yung, AA Ayón, MA Schmidt
Journal of Microelectromechanical Systems 8 (4), 403-408, 1999
1011999
Ultrathin, flexible organic–inorganic hybrid solar cells based on silicon nanowires and PEDOT: PSS
M Sharma, PR Pudasaini, F Ruiz-Zepeda, D Elam, AA Ayon
ACS applied materials & interfaces 6 (6), 4356-4363, 2014
972014
Influence of coil power on the etching characteristics in a high density plasma etcher
AA Ayon, RA Braff, R Bayt, HH Sawin, MA Schmidt
Journal of the electrochemical Society 146 (7), 2730, 1999
921999
A high-power MEMS electric induction motor
C Livermore, AR Forte, T Lyszczarz, SD Umans, AA Ayon, JH Lang
Journal of microelectromechanical systems 13 (3), 465-471, 2004
832004
Surface modification of functional self-assembled monolayers on 316L stainless steel via lipase catalysis
A Mahapatro, DM Johnson, DN Patel, MD Feldman, AA Ayon, ...
Langmuir 22 (3), 901-905, 2006
792006
Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films
X Zhang, KS Chen, R Ghodssi, AA Ayon, SM Spearing
Sensors and Actuators A: Physical 91 (3), 373-380, 2001
782001
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