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Guillaume Schelcher
Guillaume Schelcher
Verified email at imec.be
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Cited by
Year
Study of dc micro-discharge arrays made in silicon using CMOS compatible technology
MK Kulsreshath, L Schwaederle, LJ Overzet, P Lefaucheux, J Ladroue, ...
Journal of Physics D: Applied Physics 45 (28), 285202, 2012
282012
MEMS packaging process by film transfer using an anti-adhesive layer
S Brault, O Garel, G Schelcher, N Isac, F Parrain, A Bosseboeuf, F Verjus, ...
Microsystem technologies 16 (7), 1277-1284, 2010
212010
Modeling and characterization of MicroPirani vacuum gauges manufactured by a low-temperature film transfer process
G Schelcher, F Fabbri, E Lefeuvre, S Brault, P Coste, E Dufour-Gergam, ...
Journal of microelectromechanical systems 20 (5), 1184-1191, 2011
192011
Cyclic olefin copolymer plasma millireactors
G Schelcher, C Guyon, S Ognier, S Cavadias, E Martinez, V Taniga, ...
Lab on a Chip 14 (16), 3037-3042, 2014
172014
Mechanical resistance of patterned BCB bonded joints for MEMS packaging
C Cuminatto, M Braccini, G Schelcher, G Parry, F Parrain
Microelectronic engineering 111, 39-44, 2013
152013
Designing Hydrophobicity of the PLA Polymer Blend Surfaces by ICP Etching
D Vrsaljko, I Grcic, C Guyon, G Schelcher, M Tatoulian
Plasma Processes and Polymers, 2016
132016
Silver nanocluster catalytic microreactors for water purification
B Da Silva, M Habibi, S Ognier, G Schelcher, J Mostafavi-Amjad, ...
The European Physical Journal Special Topics 225 (4), 707-714, 2016
112016
Study of the Stability and Hydrophilicity of Plasma‐Modified Microfluidic Materials
B Da Silva, M Zhang, G Schelcher, L Winter, C Guyon, P Tabeling, ...
Plasma Processes and Polymers 14 (3), 1600034, 2017
92017
Le transfert de films: vers une intégration hétérogène des micro et nanosystèmes
G Schelcher
Paris 11, 2012
82012
MEMS process by film transfer using a fluorocarbon anti-adhesive layer
G Schelcher, S Brault, F Parrain, E Lefeuvre, E Dufour-Gergam, ...
Journal of The Electrochemical Society 158 (5), H545, 2011
82011
Machine learning for predictive electrical performance using OCD
S Das, J Hung, S Halder, G Schelcher, R Koret, I Turovets, M Saib, ...
Metrology, Inspection, and Process Control for Microlithography XXXIII 10959 …, 2019
42019
Co-optimization of exposure dose and etch process for SAQP pitch walk control
MJ Maslow, V Timoshkov, T Kiers, TK Jee, L Reijnen, K Kumar, ...
Optical Microlithography XXXI 10587, 1058704, 2018
22018
Micro Pirani vacuum gauges manufactured by a film transfer process
G Schelcher, E Lefeuvre, S Brault, F Parrain, E Martincic, ...
Procedia Engineering 5, 1136-1139, 2010
22010
Electrical validation of massive E-beam defect metrology in EUV-patterned interconnects
N Kissoon, E De Poortere, D Hellin, S Decoster, G Murdoch, S Lariviere, ...
Metrology, Inspection, and Process Control for Semiconductor Manufacturing …, 2021
2021
Machine learning for predictive electrical performance using OCD (Erratum)
S Das, J Hung, S Halder, G Schelcher, R Koret, I Turovets, M Saib, ...
Metrology, Inspection, and Process Control for Microlithography XXXIII 10959 …, 2019
2019
Voltage contrast edge placement estimation for overlay, CD, and local uniformity metrology (Conference Presentation)
CE Tabery, V Rutigliani, S Hastings, E de Poortere, L Wang, P Leray, ...
Metrology, Inspection, and Process Control for Microlithography XXXIII 10959 …, 2019
2019
Cyclic Olefin Copolymer Plasma Millireactors
PTMT G. Schelcher, E. Martinez, B. Da Silva, C. Guyon, S. Ognier, S ...
13th International Conference on Microreaction Technology, 2014
2014
Cyclic Olefin Copolymer Plasma Millireactors
PTMT G. Schelcher, E. Martinez, S. Ognier, L. Malaquin
1st International Conference on MICRO & NANOFLUIDICS Fundamentals and …, 2014
2014
A new microplasma reactor for the decomposition of Volatile Organic Compounds using a combination of dielectric barrier discharges with cobalt based catalyst
MT G. Schelcher, B. Da Silva, C. Guyon, S. Cavadias,S
IVC-19 2013, 2013
2013
Atmospheric pressure plasma-catalytic microsystems
MT G. Schelcher, B. Da Silva, C. Guyon, S. Ognier, S
Thermec 2013, 2-6 december, Las Vegas USA, 2013
2013
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