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Richard S. Muller
Richard S. Muller
Verified email at eecs.berkeley.edu
Title
Cited by
Cited by
Year
Device electronics for integrated circuits
RS Muller, TI Kamins
John Wiley & Sons, 2002
29992002
Etch rates for micromachining processing
KR Williams, RS Muller
Journal of Microelectromechanical systems 5 (4), 256-269, 1996
10251996
Surface micromachining for microelectromechanical systems
JM Bustillo, RT Howe, RS Muller
Proceedings of the IEEE 86 (8), 1552-1574, 1998
10221998
IC-processed electrostatic micromotors
LS Fan, YC Tai, RS Muller
Sensors and actuators 20 (1-2), 41-47, 1989
8041989
Integrated movable micromechanical structures for sensors and actuators
LS Fan, YC Tai, RS Muller
IEEE Transactions on Electron Devices 35 (6), 724-730, 1988
4701988
Magnetically actuated, addressable microstructures
JW Judy, RS Muller
Journal of Microelectromechanical systems 6 (3), 249-256, 1997
4001997
Resonant-microbridge vapor sensor
RT Howe, RS Muller
IEEE Transactions on Electron Devices 33 (4), 499-506, 1986
3621986
Silicon-processed overhanging microgripper
CJ Kim, AP Pisano, RS Muller
Journal of Microelectromechanical Systems 1 (1), 31-36, 1992
3341992
Polycrystalline silicon micromechanical beams
RT Howe, RS Muller
Journal of the Electrochemical Society 130 (6), 1420, 1983
3121983
Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers
TJ Seok, N Quack, S Han, RS Muller, MC Wu
Optica 3 (1), 64-70, 2016
3112016
Hydrogen in lithium niobate
JM Cabrera, J Olivares, M Carrascosa, J Rams, R Müller, E Diéguez
Advances in Physics 45 (5), 349-392, 1996
2731996
Surface-micromachined microoptical elements and systems
RS Muller, KY Lau
Proceedings of the IEEE 86 (8), 1705-1720, 1998
2701998
Silicon micromechanics: sensors and actuators on a chip
RT Howe, RS Muller, KJ Gabriel, WSN Trimmer
IEEE spectrum 27 (7), 29-31, 1990
2661990
IC-processed electrostatic synchronous micromotors
YC Tai, RS Muller
Sensors and Actuators 20 (1-2), 49-55, 1989
2501989
Investigation of porous silicon for vapor sensing
RC Anderson, RS Muller, CW Tobias
Lawrence Livermore National Lab.(LLNL), Livermore, CA (United States …, 1989
2501989
Magnetic microactuation of polysilicon flexure structures
JW Judy, RS Muller, HH Zappe
Journal of microelectromechanical systems 4 (4), 162-169, 1995
2451995
Polysilicon microgripper
CJ Kim, AP Pisano, RS Muller, MG Lim
Sensors and Actuators A: Physical 33 (3), 221-227, 1992
2381992
IC-processed micro-motors: Design, technology, and testing
YC Tai, LS Fan, RS Muller
IEEE Micro Electro Mechanical Systems,, Proceedings,'An Investigation of …, 1989
2341989
Stroboscopic interferometer system for dynamic MEMS characterization
MR Hart, RA Conant, KY Lau, RS Muller
Journal of microelectromechanical systems 9 (4), 409-418, 2000
2292000
A flat high-frequency scanning micromirror
RA Conant, JT Nee, KY Lau, RS Muller
Proc. Solid-State Sensor and Actuator Workshop, 6-9, 2000
2252000
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