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JANE P. CHANG
JANE P. CHANG
Verified email at g.ucla.edu
Title
Cited by
Cited by
Year
Development of hafnium based high-k materials—A review
JH Choi, Y Mao, JP Chang
Materials Science and Engineering: R: Reports 72 (6), 97-136, 2011
6032011
Lecture notes on principles of plasma processing
FF Chen, JP Chang
Springer Science & Business Media, 2012
3602012
Infrared spectroscopic analysis of the interface structure of thermally oxidized silicon
KT Queeney, MK Weldon, JP Chang, YJ Chabal, AB Gurevich, J Sapjeta, ...
Journal of Applied Physics 87 (3), 1322-1330, 2000
3522000
Profiling nitrogen in ultrathin silicon oxynitrides with angle-resolved x-ray photoelectron spectroscopy
JP Chang, ML Green, VM Donnelly, RL Opila, J Eng Jr, J Sapjeta, ...
Journal of Applied Physics 87 (9), 4449-4455, 2000
3232000
Controlled nano-doping of ultra thin films
JP Chang, TT Van, T Chiang, C Deshpandey, K Lesser
US Patent 7,544,398, 2009
3222009
Dielectric property and thermal stability of on silicon
YS Lin, R Puthenkovilakam, JP Chang
Applied physics letters 81 (11), 2041-2043, 2002
3182002
A study of the synthetic methods and properties of graphenes
CNR Rao, KS Subrahmanyam, HSSR Matte, B Abdulhakeem, ...
Science and Technology of Advanced Materials 11 (5), 054502, 2010
2262010
Electrical performance of Al2O3 gate dielectric films deposited by atomic layer deposition on 4H-SiC
CM Tanner, YC Perng, C Frewin, SE Saddow, JP Chang
Applied Physics Letters 91 (20), 2007
2012007
Kinetic study of low energy argon ion-enhanced plasma etching of polysilicon with atomic/molecular chlorine
JP Chang, JC Arnold, GCH Zau, HS Shin, HH Sawin
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 15 (4 …, 1997
1901997
Kinetic study of low energy ion-enhanced polysilicon etching using Cl, Cl2, and Cl+ beam scattering
JP Chang, HH Sawin
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 15 (3 …, 1997
1861997
Physics of high-pressure helium and argon radio-frequency plasmas
M Moravej, X Yang, GR Nowling, JP Chang, RF Hicks, SE Babayan
Journal of applied physics 96 (12), 7011-7017, 2004
1722004
In situ control of atomic-scale Si layer with huge strain in the nanoheterostructure NiSi/Si/NiSi through point contact reaction
KC Lu, WW Wu, HW Wu, CM Tanner, JP Chang, LJ Chen, KN Tu
Nano letters 7 (8), 2389-2394, 2007
1612007
Active Layer-Incorporated, Spectrally Tuned Au/SiO2 Core/Shell Nanorod-Based Light Trapping for Organic Photovoltaics
V Jankovic, Y Yang, J You, L Dou, Y Liu, P Cheung, JP Chang, Y Yang
ACS nano 7 (5), 3815-3822, 2013
1602013
Patterning and templating for nanoelectronics
K Galatsis, KL Wang, M Ozkan, CS Ozkan, Y Huang, JP Chang, ...
Advanced Materials 22 (6), 769-778, 2010
1552010
Method for depositing a coating having a relatively high dielectric constant onto a substrate
J Chang, YS Lin, A Kepten, M Sendler, S Levy, R Bloom
US Patent 6,884,719, 2005
1532005
Dielectric property and conduction mechanism of ultrathin zirconium oxide films
JP Chang, YS Lin
Applied physics letters 79 (22), 3666-3668, 2001
1522001
Synthesis and luminescence properties of erbium-doped Y2O3 nanotubes
Y Mao, JY Huang, R Ostroumov, KL Wang, JP Chang
The Journal of Physical Chemistry C 112 (7), 2278-2285, 2008
1482008
Luminescence of Nanocrystalline Erbium‐Doped Yttria
Y Mao, T Tran, X Guo, JY Huang, CK Shih, KL Wang, JP Chang
Advanced Functional Materials 19 (5), 748-754, 2009
1452009
Plasma-surface kinetics and feature profile evolution in chlorine etching of polysilicon
JP Chang, AP Mahorowala, HH Sawin
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 16 (1 …, 1998
1401998
Mechanical shuttling of linear motor-molecules in condensed phases on solid substrates
TJ Huang, HR Tseng, L Sha, W Lu, B Brough, AH Flood, BD Yu, ...
Nano Letters 4 (11), 2065-2071, 2004
1382004
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