Steven Nagle
Steven Nagle
S.F.Nagle Consulting
Verified email at alum.mit.edu
Title
Cited by
Cited by
Year
Power MEMS and microengines
AH Epstein, SD Senturia, G Anathasuresh, A Ayon, K Breuer, KS Chen, ...
Proceedings of International Solid State Sensors and Actuators Conference …, 1997
2991997
Micro-heat engines, gas turbines, and rocket engines-The MIT microengine project
A Epstein, S Senturia, O Al-Midani, G Anathasuresh, A Epstein, S Senturia, ...
28th Fluid dynamics conference, 1773, 1997
2471997
Microturbomachinery
AH Epstein, SD Senturia, IA Waitz, JH Lang, SA Jacobson, FF Ehrich, ...
US Patent 5,932,940, 1999
1771999
Microturbomachinery
AH Epstein, SD Senturia, IA Waitz, JH Lang, SA Jacobson, FF Ehrich, ...
US Patent 6,392,313, 2002
1262002
An electrostatic induction micromotor supported on gas-lubricated bearings
LG Frechette, SF Nagle, R Ghodssi, SD Umans, MA Schmidt, JH Lang
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro …, 2001
1032001
Fast-scanning SPM and method of operating same
C Prater, C Su, N Phan, JM Markakis, C Cusworth, J Shi, JH Kindt, ...
US Patent 7,770,231, 2010
1012010
Process for fabricating MEMS membrane with integral mirror/lens
DC Flanders, SF Nagle, MB Stern
US Patent 7,208,333, 2007
862007
An electric induction micromotor
SF Nagle, C Livermore, LG Frechette, R Ghodssi, JH Lang
Journal of microelectromechanical systems 14 (5), 1127-1143, 2005
632005
Characterization of silicon wafer bonding for power MEMS applications
AA Ayon, X Zhang, KT Turner, D Choi, B Miller, SF Nagle, SM Spearing
Sensors and Actuators A: Physical 103 (1-2), 1-8, 2003
552003
Tailoring etch directionality in a deep reactive ion etching tool
AA Ayon, S Nagle, L Frechette, A Epstein, MA Schmidt
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000
432000
Thick buried oxide in silicon (TBOS): an integrated fabrication technology for multi-stack wafer-bonded MEMS processes
R Ghodssi, LG Frechette, SF Nagle, X Zhang, AA Ayon, SD Senturia, ...
Proc. 10th Int. Conf. on Solid-State Sensors and Actuators (Tansducers’ 99 …, 1999
351999
A micro-scale electric-induction machine for a micro gas turbine generator
SF Nagle, JH Lang
27th Annual Meeting of the Electrostatics Society of America, 1999
251999
Modal structures for axial wave propagation in a continuously twisted structurally chiral medium
SF Nagle, A Lakhtakia, W Thompson Jr
The Journal of the Acoustical Society of America 97 (1), 42-50, 1995
251995
Process for integrating dielectric optical coatings into micro-electromechanical devices
MF Miller, M Van Le, CC Cook, DC Flanders, SF Nagle
US Patent 6,790,698, 2004
212004
Analysis, design, and fabrication of an electric induction micromotor for a micro gas-turbine generator
SF Nagle
Massachusetts Institute of Technology, 2000
202000
MEMS membrane with integral mirror/lens
DC Flanders, SF Nagle, MB Stern
US Patent 6,768,756, 2004
172004
Shear axial modes in a PCTSCM Part I: piezoelectric stiffening and selective attenuation
SF Nagle, A Lakhtakia
Sensors and Actuators A: Physical 49 (3), 195-201, 1995
161995
Probe device for a metrology instrument and method of fabricating the same
W Fan, SF Nagle
US Patent 7,823,216, 2010
132010
Attenuation and handedness of axial propagation modes in a cholesteric liquid crystal
SF Nagle, A Lakhtakia
Microwave and Optical Technology Letters 7 (16), 749-752, 1994
131994
Shear axial modes in a PCTSCM part II: towards transduction applications
SF Nagle, A Lakhtakia
Sensors and Actuators A: Physical 55 (2-3), 139-147, 1996
111996
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